Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6967167 | Silicon dioxide removing method | Peter J. Geiss, Alvin J. Joseph, Xuefeng Liu, James S. Nakos | 2005-11-22 |
| 6909157 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | Jay Burnham, James S. Nakos, Steven M. Shank, Deborah A. Tucker, Beth Ward | 2005-06-21 |
| 6893948 | Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size | Arne Ballantine, Kevin K. Chan, Jeffrey D. Gilbert, Kevin M. Houlihan, Glen L. Miles +3 more | 2005-05-17 |
| 6893979 | Method for improved plasma nitridation of ultra thin gate dielectrics | Mukesh V. Khare, Christopher P. D'Emic, Thomas T. Hwang, Paul C. Jamison, Beth Ward | 2005-05-17 |