Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893979 | Method for improved plasma nitridation of ultra thin gate dielectrics | Mukesh V. Khare, Christopher P. D'Emic, Paul C. Jamison, James J. Quinlivan, Beth Ward | 2005-05-17 |