Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909157 | Thermal nitrogen distribution method to improve uniformity of highly doped ultra-thin gate capacitors | Jay Burnham, James S. Nakos, James J. Quinlivan, Deborah A. Tucker, Beth Ward | 2005-06-21 |
| 6887797 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Patrick R. Varekamp | 2005-05-03 |
| 6838396 | Bilayer ultra-thin gate dielectric and process for semiconductor metal contamination reduction | Jay Burnham, James R. Elliott, Kenneth R. Gault, Mousa H. Ishaq, Mary A. St. Lawrence | 2005-01-04 |