Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6887797 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank | 2005-05-03 |