Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6958506 | High-dielectric constant insulators for feol capacitors | Evgeni Gousev, Harald Okorn-Schmidt, Arne Ballantine, Eduard A. Cartier, Douglas D. Coolbaugh | 2005-10-25 |
| 6887797 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2005-05-03 |
| 6852575 | Method of forming lattice-matched structure on silicon and structure formed thereby | Nestor A. Bojarczuk, Supratik Guha, Vijay Narayanan, Lars-Ake Ragnarsson | 2005-02-08 |