Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933095 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +4 more | 2005-08-23 |
| 6875556 | Resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-04-05 |
| 6864037 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo +4 more | 2005-03-08 |
| 6861197 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago +5 more | 2005-03-01 |
| 6858760 | Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method | Haruhiko Komoriya, Katsunori Kawamura, Satoru Kobayashi, Kazuhiko Maeda | 2005-02-22 |