Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946235 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-09-20 |
| 6943271 | Process for producing fluorine-containing, polymerizable styrene monomer and intermediates used in same | Shinichi Sumida, Takashi Kume, Sunao Koga | 2005-09-13 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-07-12 |
| 6875556 | Resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-04-05 |
| 6872514 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-03-29 |
| 6858760 | Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method | Satoru Miyazawa, Katsunori Kawamura, Satoru Kobayashi, Kazuhiko Maeda | 2005-02-22 |
| 6855477 | Chemically amplified resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masaru Sasago, Masayuki Endo +3 more | 2005-02-15 |