Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6858760 | Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method | Haruhiko Komoriya, Satoru Miyazawa, Satoru Kobayashi, Kazuhiko Maeda | 2005-02-22 |