Issued Patents 2005
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949329 | Pattern formation method | Masayuki Endo | 2005-09-27 |
| 6946235 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2005-09-20 |
| 6936401 | Pattern formation material and pattern formation method | Masayuki Endo | 2005-08-30 |
| 6933095 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +4 more | 2005-08-23 |
| 6930393 | Composition for forming porous film, porous film and method for forming the same, interlayer insulator film, and semiconductor device | Yoshitaka Hamada, Takeshi Asano, Hideo Nakagawa | 2005-08-16 |
| 6916592 | Esters, polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2005-07-12 |
| 6913857 | Exposure mask, method for manufacturing the mask, and exposure method | Masayuki Endo, Tokushige Hisatsugu | 2005-07-05 |
| 6913873 | Pattern formation method | Masayuki Endo | 2005-07-05 |
| 6908729 | Pattern formation method | Masayuki Endo | 2005-06-21 |
| 6902999 | Pattern formation method | Masayuki Endo | 2005-06-07 |
| 6875556 | Resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2005-04-05 |
| 6872514 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2005-03-29 |
| 6864037 | Polymers, resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +4 more | 2005-03-08 |
| 6861197 | Polymers, resist compositions and patterning process | Yuji Harada, Jun Watanabe, Jun Hatakeyama, Yoshio Kawai, Masayuki Endo +5 more | 2005-03-01 |
| 6855477 | Chemically amplified resist compositions and patterning process | Jun Hatakeyama, Yuji Harada, Yoshio Kawai, Masayuki Endo, Shinji Kishimura +3 more | 2005-02-15 |
| 6841488 | Pattern formation method | Masayuki Endo | 2005-01-11 |