Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956225 | Method and apparatus for selective pre-dispersion of extracted ion beams in ion implantation systems | — | 2005-10-18 |
| 6885014 | Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam | — | 2005-04-26 |
| 6881966 | Hybrid magnetic/electrostatic deflector for ion implantation systems | Robert D. Rathmell, Yongzhang Huang | 2005-04-19 |
| 6879109 | Thin magnetron structures for plasma generation in ion implantation systems | William F. DiVergilio, Bo H. Vanderberg | 2005-04-12 |
| 6872953 | Two dimensional stationary beam profile and angular mapping | — | 2005-03-29 |