Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903350 | Ion beam scanning systems and methods for improved ion implantation uniformity | Andrew M. Ray, Kevin W. Wenzel | 2005-06-07 |
| 6891174 | Method and system for ion beam containment using photoelectrons in an ion beam guide | Kevin W. Wenzel | 2005-05-10 |
| 6879109 | Thin magnetron structures for plasma generation in ion implantation systems | Victor M. Benveniste, William F. DiVergilio | 2005-04-12 |