Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6903350 | Ion beam scanning systems and methods for improved ion implantation uniformity | Bo H. Vanderberg, Andrew M. Ray | 2005-06-07 |
| 6891174 | Method and system for ion beam containment using photoelectrons in an ion beam guide | Bo H. Vanderberg | 2005-05-10 |