Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6949895 | Unipolar electrostatic quadrupole lens and switching methods for charged beam transport | Youngzhang Huang | 2005-09-27 |
| 6947274 | Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage | Peter L. Kellerman, Shu Qin | 2005-09-20 |
| 6879109 | Thin magnetron structures for plasma generation in ion implantation systems | Victor M. Benveniste, Bo H. Vanderberg | 2005-04-12 |