Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946403 | Method of making a MEMS electrostatic chuck | Shu Qin, Ernie Allen, Douglas Brown | 2005-09-20 |
| 6947274 | Clamping and de-clamping semiconductor wafers on an electrostatic chuck using wafer inertial confinement by applying a single-phase square wave AC clamping voltage | Shu Qin, William F. DiVergilio | 2005-09-20 |
| 6905984 | MEMS based contact conductivity electrostatic chuck | Shu Qin, Ernie Allen, Douglas Brown | 2005-06-14 |