Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946403 | Method of making a MEMS electrostatic chuck | Peter L. Kellerman, Shu Qin, Douglas Brown | 2005-09-20 |
| 6905984 | MEMS based contact conductivity electrostatic chuck | Peter L. Kellerman, Shu Qin, Douglas Brown | 2005-06-14 |