YH

Yongzhang Huang

AT Axcelis Technologies: 1 patents #14 of 47Top 30%
📍 Yachiyo, MA: #1 of 1 inventorsTop 100%
Overall (2005): #71,641 of 245,428Top 30%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6881966 Hybrid magnetic/electrostatic deflector for ion implantation systems Victor M. Benveniste, Robert D. Rathmell 2005-04-19