Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863019 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Shamouil Shamouilian, Canfeng Lai, Michael S. Cox, Padmanabhan Krishnaraj, Tsutomu Tanaka +2 more | 2005-03-08 |