Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927161 | Low-k dielectric layer stack including an etch indicator layer for use in the dual damascene technique | Christof Streck, Georg Sulzer | 2005-08-09 |
| 6893956 | Barrier layer for a copper metallization layer including a low-k dielectric | Joerg Hohage, Thomas Werner, Massud Aminpur | 2005-05-17 |