Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927161 | Low-k dielectric layer stack including an etch indicator layer for use in the dual damascene technique | Hartmut Ruelke, Georg Sulzer | 2005-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927161 | Low-k dielectric layer stack including an etch indicator layer for use in the dual damascene technique | Hartmut Ruelke, Georg Sulzer | 2005-08-09 |