Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964874 | Void formation monitoring in a damascene process | Peter Hübler, Frank Koschinsky | 2005-11-15 |
| 6893956 | Barrier layer for a copper metallization layer including a low-k dielectric | Hartmut Ruelke, Joerg Hohage, Massud Aminpur | 2005-05-17 |
| 6867610 | Test structure for determining the stability of electronic devices comprising connected substrates | Mathias Bottcher | 2005-03-15 |