Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6957997 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Jens Kramer, Uwe Günter | 2005-10-25 |
| 6958247 | Method of electroplating copper over a patterned dielectric layer to enhance process uniformity of a subsequent CMP process | Axel Preusse, Markus Nopper, Frank Mauersberger | 2005-10-25 |