Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6957997 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Gerd Marxsen, Uwe Günter | 2005-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6957997 | Method and system for controlling the chemical mechanical polishing by using a sensor signal of a pad conditioner | Gerd Marxsen, Uwe Günter | 2005-10-25 |