Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Tianniu Chen, Chongying Xu | 2005-11-01 |
| 6943139 | Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations | Michael B. Korzenski, Eliodor G. Ghenciu, Chongying Xu | 2005-09-13 |
| 6936542 | Polishing slurries for copper and associated materials | William A. Wojtczak, Long Nguyen, Cary Regulski | 2005-08-30 |
| 6909839 | Delivery systems for efficient vaporization of precursor source material | Luping Wang, Chongying Xu | 2005-06-21 |
| 6869638 | Source reagent compositions for CVD formation of gate dielectric thin films using amide precursors and method of using same | Chongying Xu, Bryan C. Hendrix, Jeffrey F. Roeder | 2005-03-22 |
| 6849200 | Composition and process for wet stripping removal of sacrificial anti-reflective material | David Bernhard, David W. Minsek, Melissa Murphy | 2005-02-01 |
| 6846424 | Plasma-assisted dry etching of noble metal-based materials | Phillip Chen, Frank Dimeo, Jr., Peter C. Van Buskirk, Peter S. Kirlin | 2005-01-25 |