Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Tianniu Chen, Thomas H. Baum | 2005-11-01 |
| 6943139 | Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations | Michael B. Korzenski, Eliodor G. Ghenciu, Thomas H. Baum | 2005-09-13 |
| 6909839 | Delivery systems for efficient vaporization of precursor source material | Luping Wang, Thomas H. Baum | 2005-06-21 |
| 6869638 | Source reagent compositions for CVD formation of gate dielectric thin films using amide precursors and method of using same | Thomas H. Baum, Bryan C. Hendrix, Jeffrey F. Roeder | 2005-03-22 |