Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Chongying Xu, Thomas H. Baum | 2005-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Chongying Xu, Thomas H. Baum | 2005-11-01 |