Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6909839 | Delivery systems for efficient vaporization of precursor source material | Thomas H. Baum, Chongying Xu | 2005-06-21 |
| 6857447 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | W. Karl Olander, Matthew B. Donatucci, Michael J. Wodjenski | 2005-02-22 |