Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6868869 | Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases | — | 2005-03-22 |
| 6857447 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | Matthew B. Donatucci, Luping Wang, Michael J. Wodjenski | 2005-02-22 |
| 6845619 | Integrated system and process for effluent abatement and energy generation | — | 2005-01-25 |
| 6841141 | System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers | Jose I. Arno | 2005-01-11 |