Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947138 | Optical sensor system and method for detection of hydrides and acid gases | — | 2005-09-20 |
| 6909973 | Photometrically modulated delivery of reagents | — | 2005-06-21 |
| 6905663 | Apparatus and process for the abatement of semiconductor manufacturing effluents containing fluorine gas | — | 2005-06-14 |
| 6841141 | System for in-situ generation of fluorine radicals and/or fluorine-containing interhalogen (XFn) compounds for use in cleaning semiconductor processing chambers | W. Karl Olander | 2005-01-11 |