Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846424 | Plasma-assisted dry etching of noble metal-based materials | Thomas H. Baum, Phillip Chen, Frank Dimeo, Jr., Peter C. Van Buskirk | 2005-01-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6846424 | Plasma-assisted dry etching of noble metal-based materials | Thomas H. Baum, Phillip Chen, Frank Dimeo, Jr., Peter C. Van Buskirk | 2005-01-25 |