Issued Patents 2004
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828226 | Removal of SiON residue after CMP | Kei-Wei Chen, Kuo-Hsiu Wei, Yu-Kin Lin, Ting-Chun Wang, Shih-Tzung Chang | 2004-12-07 |
| 6825120 | Metal surface and film protection method to prolong Q-time after metal deposition | Chi-Wen Liu | 2004-11-30 |
| 6815007 | Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film | Ming-Hwa Yoo, Shih-Chi Lin, Yi-Lung Cheng, Szu-An Wu | 2004-11-09 |
| 6815072 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Ming-Hwa Yoo, Yi-Lung Cheng, Szu-An Wu | 2004-11-09 |
| 6802935 | Semiconductor chamber process apparatus and method | Yi-Lung Cheng, Hui-Chi Lin, Szu-An Wu | 2004-10-12 |
| 6790778 | Method for capping over a copper layer | Yi-Lung Cheng, We-Li Chen | 2004-09-14 |
| 6784077 | Shallow trench isolation process | Shih-Chi Lin, Chih-Chung Lee, Guey Bao Huang, Szu-An Wu, Chun-Chun Yeh | 2004-08-31 |
| 6776850 | Preventative maintenance aided tool for CVD chamber | Miao-Cheng Liao, Hung-Hsin Liang, Hsiang-Sheng Cheng, Sheng-Te Shu, Chih-Yuan Yang | 2004-08-17 |
| 6769959 | Method and system for slurry usage reduction in chemical mechanical polishing | Kei-Wei Chen, Ting-Chun Wang, Shih-Tzung Chang, Yu-Ku Lin, Ming-Wen Chen +1 more | 2004-08-03 |
| 6673661 | Self-aligned method for forming dual gate thin film transistor (TFT) device | Chi-Wen Liu, Ting-Chang Chang, Po-Tsun Liu | 2004-01-06 |