Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815072 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Ming-Hwa Yoo, Szu-An Wu, Ying-Lang Wang | 2004-11-09 |
| 6815007 | Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film | Ming-Hwa Yoo, Shih-Chi Lin, Szu-An Wu, Ying-Lang Wang | 2004-11-09 |
| 6802935 | Semiconductor chamber process apparatus and method | Hui-Chi Lin, Szu-An Wu, Ying-Lang Wang | 2004-10-12 |
| 6790778 | Method for capping over a copper layer | Ying-Lang Wang, We-Li Chen | 2004-09-14 |
| 6759347 | Method of forming in-situ SRO HDP-CVD barrier film | Ming-Hwa Yoo, Sze-An Wu, Ying-Lung Wang | 2004-07-06 |
| 6713407 | Method of forming a metal nitride layer over exposed copper | Wen-Kung Cheng, Sez-An Wu, Yi-Lung Wang, Shin-Chi Lin | 2004-03-30 |
| 6703317 | Method to neutralize charge imbalance following a wafer cleaning process | Ming-Hwa Yoo, Sze-An Wu, Ying-Lung Wang | 2004-03-09 |