Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815007 | Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film | Ming-Hwa Yoo, Shih-Chi Lin, Yi-Lung Cheng, Ying-Lang Wang | 2004-11-09 |
| 6815072 | Method to solve particle performance of FSG layer by using UFU season film for FSG process | Ming-Hwa Yoo, Yi-Lung Cheng, Ying-Lang Wang | 2004-11-09 |
| 6802935 | Semiconductor chamber process apparatus and method | Yi-Lung Cheng, Hui-Chi Lin, Ying-Lang Wang | 2004-10-12 |
| 6784077 | Shallow trench isolation process | Shih-Chi Lin, Chih-Chung Lee, Guey Bao Huang, Ying-Lang Wang, Chun-Chun Yeh | 2004-08-31 |