Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759347 | Method of forming in-situ SRO HDP-CVD barrier film | Yi-Lung Cheng, Ming-Hwa Yoo, Sze-An Wu | 2004-07-06 |
| 6703317 | Method to neutralize charge imbalance following a wafer cleaning process | Yi-Lung Cheng, Ming-Hwa Yoo, Sze-An Wu | 2004-03-09 |