Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769959 | Method and system for slurry usage reduction in chemical mechanical polishing | Kei-Wei Chen, Ting-Chun Wang, Shih-Tzung Chang, Ying-Lang Wang, Ming-Wen Chen +1 more | 2004-08-03 |
| 6695921 | Hoop support for semiconductor wafer | Hsi-Kuei Cheng, Ting-Chu Wang, Chin-Te Huang, Huai-Tei Yang, Chun-Chang Chen +1 more | 2004-02-24 |
| 6682605 | Apparatus and method for removing coating layers from alignment marks | Aaron Cheng, Ting-Chun Wang, Chun-Chang Chen, Yi Wang | 2004-01-27 |