Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812043 | Method for forming a carbon doped oxide low-k insulating layer | Tien-I Bao, Chung-Chi Ko, Syun-Ming Jang | 2004-11-02 |
| 6770570 | Method of forming a semiconductor device with a substantially uniform density low-k dielectric layer | Hsin-Hsien Lu, Syun-Ming Jang | 2004-08-03 |
| 6756321 | Method for forming a capping layer over a low-k dielectric with improved adhesion and reduced dielectric constant | Chung-Chi Ko, Yung-Cheng Lu, Lain-Jong Li, Yu-Huei Chen, Shu E Ku | 2004-06-29 |
| 6753269 | Method for low k dielectric deposition | Yung-Chen Lu, Syun-Ming Jang | 2004-06-22 |