Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777251 | Metrology for monitoring a rapid thermal annealing process | Ching-Shan Lu, Fu-Su Lee, Wei-Ming You, Yu-Chien Hsiao | 2004-08-17 |
| 6753249 | Multilayer interface in copper CMP for low K dielectric | Ying-Ho Chen, Weng Chang | 2004-06-22 |
| 6722949 | Ventilated platen/polishing pad assembly for chemcial mechanical polishing and method of using | Tien-Chen Hu | 2004-04-20 |
| 6706577 | Formation of dual gate oxide by two-step wet oxidation | Syun-Ming Jang, Chen-Hua Yu | 2004-03-16 |