Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828245 | Method of improving an etching profile in dual damascene etching | — | 2004-12-07 |
| 6767274 | Method to reduce defect/slurry residue for copper CMP | Chi-Chun Chen, Shih-Chang Chen | 2004-07-27 |
| 6753249 | Multilayer interface in copper CMP for low K dielectric | Ying-Ho Chen, Jih-Churng Twu | 2004-06-22 |