Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777251 | Metrology for monitoring a rapid thermal annealing process | Ching-Shan Lu, Wei-Ming You, Jih-Churng Twu, Yu-Chien Hsiao | 2004-08-17 |
| 6740196 | RTA chamber with in situ reflective index monitor | Juin-Jie Chang, Ching-Shan Lu | 2004-05-25 |