Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, James J. Erickson, Matthew Egloff | 2004-08-10 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Linlin Chen, John M. Pedersen, Vladimir Zila | 2004-03-02 |