Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, Steve Eudy, Thomas H. Oberlitner, Matthew Egloff | 2004-08-10 |
| 6673216 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | John M. Pedersen | 2004-01-06 |