Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773559 | Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece | Daniel J. Woodruff, James J. Erickson, Thomas H. Oberlitner, Matthew Egloff | 2004-08-10 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Gregory J. Wilson, Paul R. McHugh | 2004-06-08 |