Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806186 | Submicron metallization using electrochemical deposition | Linlin Chen, Lyndon Graham, Dakin Fulton, Robert W. Batz, Jr. | 2004-10-19 |
| 6776892 | Semiconductor plating system workpiece support having workpiece engaging electrode with pre-conditioned contact face | Jeffrey I. Turner | 2004-08-17 |
| 6753251 | Method for filling recessed micro-structures with metallization in the production of a microelectronic device | Lyndon Graham | 2004-06-22 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Steve Eudy, Gregory J. Wilson, Paul R. McHugh | 2004-06-08 |