Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782645 | Safety guard and deactivation device | Ernest J. Hickle | 2004-08-31 |
| 6780374 | Method and apparatus for processing a microelectronic workpiece at an elevated temperature | Robert A. Weaver, Paul R. McHugh | 2004-08-24 |
| 6747734 | Apparatus and method for processing a microelectronic workpiece using metrology | Thomas Ritzdorf, Steve Eudy, Paul R. McHugh | 2004-06-08 |