Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6773560 | Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces | Jeremy Willey, Daniel J. Woodruff | 2004-08-10 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, Vladimir Zila | 2004-03-02 |
| 6673216 | Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing | James J. Erickson | 2004-01-06 |