Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6761806 | Processing apparatus with sensory subsystem for detecting the presence/absence of wafers or other workpieces | — | 2004-07-13 |
| 6717171 | Method and apparatus for accessing microelectronic workpiece containers | Randy Harris, Daniel P. Bexten | 2004-04-06 |
| 6699373 | Apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2004-03-02 |
| 6672820 | Semiconductor processing apparatus having linear conveyer system | Mark Dix, Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle | 2004-01-06 |