Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system | Jin-Man Kim, Young-Min Min, Chang Hyun Jo | 2004-11-30 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Young-Min Min, Sang-Mun Chon, Jin-Man Kim | 2004-11-09 |
| 6705020 | Method of and apparatus for use in orienting an object at a reference angle | Gyeong-Su Keum, Hyung-Sik Hong, Gum-Chan An, Hae-Keun Youn, Byoung-Sik Jung +1 more | 2004-03-16 |
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Sang-Jun Chun, Young-Min Min | 2004-02-03 |