Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Yun-Sik Yang, Young-Min Min | 2004-02-03 |
SC
Sang-Jun Chun
Overall (2004): #121,875 of 270,089Top 50%
1
Patents 2004