Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system | Yun-Sik Yang, Jin-Man Kim, Chang Hyun Jo | 2004-11-30 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Sang-Mun Chon, Yun-Sik Yang, Jin-Man Kim | 2004-11-09 |
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Jin-Man Kim, Yun-Sik Yang, Sang-Jun Chun | 2004-02-03 |