Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824617 | Input/output valve switching apparatus of semiconductor manufacturing system | Yun-Sik Yang, Young-Min Min, Chang Hyun Jo | 2004-11-30 |
| 6816029 | RF matching unit | Dae-Kyu Choi, Young-Min Min, Sang-Mun Chon, Yun-Sik Yang | 2004-11-09 |
| 6764250 | Method of load reduction on buried culvert using EPS block and/or geosynthetics | Sam-duck Cho, Ho-bi Kim, Sae-yong Oh, Bong-Hyuk Choi, Tae-sung Ju +1 more | 2004-07-20 |
| 6684652 | Method of and an apparatus for regulating the temperature of an electrostatic chuck | Yun-Sik Yang, Sang-Jun Chun, Young-Min Min | 2004-02-03 |