Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815899 | Remote plasma generator | — | 2004-11-09 |
| 6816029 | RF matching unit | Young-Min Min, Sang-Mun Chon, Yun-Sik Yang, Jin-Man Kim | 2004-11-09 |
| 6762393 | Inductively coupled plasma source with conductive layer and process of plasma generation | — | 2004-07-13 |